(Invited) Challenges on Surface Conditioning in 3D Device Architectures: Triple-Gate FinFETs, Gate-All-Around Lateral and Vertical Nanowire FETs
A. Veloso(IMEC), Nadine Collaert(IMEC), B. T. Chan, E. Vecchio(IMEC), Philippe Matagne(IMEC), Farid Sebaai(IMEC), Erik Rosseel(IMEC), Eddy Simoen(IMEC), S. Brus(University of Liège), Alexey Milenin, Vasile Paraschiv(IMEC), Waikin Li, Zheng Tao, Roger Loo(IMEC), K. Devriendt(IMEC), D. Mocuta(IMEC), Philippe Marien, Efrain Altamirano Sánchez, Christophe Lorant, Geert Hellings(IMEC), Claudia Fleischmann(IMEC), Niamh Waldron, Geert Eneman(Research Foundation - Flanders), Davit Melkonyan, Bernardette Kunert, Lieve Teugels(IMEC), Dennis H. van Dorp(IMEC), Trong Huynh-Bao, A. Sibaja-Hernandez
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