Vertical Nanowire and Nanosheet FETs: Device Features, Novel Schemes for Improved Process Control and Enhanced Mobility, Potential for Faster & More Energy Efficient Circuits

A. Veloso(IMEC), Philippe Matagne(IMEC), E. Vecchio(IMEC), Farid Sebaai(IMEC), W. Li(IMEC), Erik Rosseel(IMEC), Eddy Simoen(IMEC), S. Brus(University of Liège), Andriy Hikavyy(IMEC), Vasile Paraschiv(IMEC), D. Radisic(IMEC), Trong Huynh-Bao, K. Devriendt(IMEC), Paola Favia(IMEC), Janko Versluijs(IMEC), Naoto Horiguchi(IMEC), Claudia Fleischmann(IMEC), Jeroen E. Scheerder(IMEC), Adrian Chasin(IMEC), H. Bender(IMEC), Geert Eneman(Research Foundation - Flanders), Lieve Teugels(IMEC), Roger Loo(IMEC), E. Vancoille(IMEC), B. T. Chan
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December 1, 2019
Cited by 41


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