Low Power CMOS Featuring Dual Work Function FUSI on HfSiON and 17ps Inverter Delay
Thomas Hoffmann(IMEC), S. Biesemans(IMEC), B. Froment(STMicroelectronics (Switzerland)), A. Lauwers(IMEC), I. Satoru(Imec the Netherlands), S. Brus(University of Liège), J. Ramos(IMEC), H. L. Tigelaar(IMEC), C. Vrancken(IMEC), M. Niwa, H.Y. Yu(IMEC), Mark van Dal(Philips (United States)), T. Chiarella(IMEC), A. Nackaerts(IMEC), A. Rothschild(IMEC), A. Veloso(IMEC), J. A. Kittl(IMEC), R. Mitsuhashi(Panasonic (China)), C. Kerner(IMEC), Philip Absil(IMEC), M. Jurczak(IMEC)
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