Migrating from planar to FinFET for further CMOS scaling: SOI or Bulk?
T. Chiarella(IMEC), Thomas Hoffmann(IMEC), S. Kubicek(IMEC), S. Biesemans(IMEC), A. Redolfi(IMEC), A. Lauwers(IMEC), A. Mercha(IMEC), S. Brus(University of Liège), R. Dittrich(IMEC), C. Vrancken(IMEC), A. De Keersgieter(IMEC), Liesbeth Witters(IMEC), C. Ortolland(IMEC), P. Absil(IMEC), Bertrand Parvais(IMEC), Lars‐Åke Ragnarsson(IMEC), Michał Rakowski(IMEC), R. Rooyackers(IMEC), C. Kerner(IMEC)
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