Deposition of HfO2 on germanium and the impact of surface pretreatments

Sven Van Elshocht(Columbia University), Marc Heyns(IMEC), Bart Onsia, Chao Zhao, Thierry Conard(IMEC), Matty Caymax(IMEC), Brice De Jaeger(IMEC), Ivo Teerlinck(IMEC), Bert Brijs(IMEC), Stefan De Gendt(Imec the Netherlands), T. Chiarella(IMEC), Stefan Kubicek(Austrian Academy of Sciences), Olivier Richard(IMEC), Marc Meuris(IMEC), Jan Van Steenbergen(IMEC)
Applied Physics Letters
October 25, 2004
10.1063/1.1810642
Cited by 106

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