Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling succession

T. Chiarella(IMEC), Thomas Hoffmann(IMEC), S. Biesemans(IMEC), A. Redolfi(IMEC), A. Lauwers(IMEC), A. Mercha(IMEC), S. Brus(University of Liège), C. Vrancken(IMEC), A. De Keersgieter(IMEC), Liesbeth Witters(IMEC), C. Ortolland(IMEC), P. Absil(IMEC), Stefan Kubicek(Austrian Academy of Sciences), Michał Rakowski(IMEC), Bertrand Parvais(IMEC), C. Kerner(IMEC)

Solid-State Electronics

May 21, 2010

10.1016/j.sse.2010.04.010

Cited by 120

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