Experimental and theoretical verification of channel conductivity degradation due to grain boundaries and defects in 3D NAND
A. Subirats(IMEC), A. Furnémont(IMEC), G. Van den bosch(IMEC), Andriy Hikavyy(IMEC), V. Putcha(IMEC), E. Capogreco(IMEC), Romain Delhougne(IMEC), R. Degraeve(IMEC), D. Linten(IMEC), A. Arreghini(IMEC), L. Breuil(IMEC), C.-L. Tan(IMEC)
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