A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides

R. Degraeve(IMEC), H.E. Maes(IMEC), Michel Depas(IMEC), G. Groeseneken(KU Leuven), R. Bellens(IMEC)
Unknown
November 19, 2002
10.1109/iedm.1995.499353
Cited by 337

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