Dual Work Function Phase Controlled Ni-FUSI CMOS (NiSi NMOS, Ni2Si or Ni31Si12 PMOS): Manufacturability, Reliability & Process Window Improvement by Sacrificial SiGe Cap
J. A. Kittl(IMEC), A. Veloso(IMEC), S. Biesemans(IMEC), S. Locorotondo(IMEC), M. Jurczak(IMEC), C. Demeurisse(Imec the Netherlands), S. Brus(University of Liège), H. L. Tigelaar(IMEC), T. Kauerauf(IMEC), A. Lauwers, Thomas Hoffmann(IMEC), C. Vrancken(IMEC), M. Niwa, H.Y. Yu(IMEC), H. Bender(IMEC), Małgorzata Pawlak(IMEC), T. Chiarella(IMEC), A. Shickova(IMEC), P. Absil(IMEC), Stefan Kubicek(Austrian Academy of Sciences), B. Sijmus(IMEC), C. Kerner(IMEC), Olivier Richard(IMEC), Jean‐François de Marneffe(IMEC)
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