Ni-based FUSI gates: CMOS Integration for 45nm node and beyondThomas Hoffmann, J. A. Kittl, H. L. Tigelaar et al.|Unknown|2006Cited by 16
Dual Work Function Phase Controlled Ni-FUSI CMOS (NiSi NMOS, Ni2Si or Ni31Si12 PMOS): Manufacturability, Reliability & Process Window Improvement by Sacrificial SiGe CapJ. A. Kittl, A. Veloso, S. Biesemans et al.|Unknown|2006Cited by 9