Record I<inf>ON</inf>/I<inf>OFF</inf> performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability
Jérôme Mitard(IMEC), Marc Heyns(IMEC), Koen Martens(IMEC), Evi Vrancken(IMEC), Jason Lin(Apellis Pharmaceuticals (United States)), L. Pantisano(IMEC), Frederik Leys(IMEC), Denis Shamiryan(IMEC), Gillis Winderickx(IMEC), Matty Caymax(IMEC), Brice De Jaeger(IMEC), Geert Hellings(IMEC), Geert Eneman(Research Foundation - Flanders), T. Vandeweyer(IMEC), Marc Meuris(IMEC), D.P. Brunco(Imec the Netherlands), Roger Loo(IMEC), K. De Meyer(IMEC), C.H. Yu(Taiwan Semiconductor Manufacturing Company (Taiwan))
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