Electrical properties of high-κ gate dielectrics: Challenges, current issues, and possible solutions

Michel Houssa(IMEC), Marc Heyns(IMEC), L.-Å. Ragnarsson(IMEC), L. Pantisano(IMEC), G. Pourtois(IMEC), R. Degraeve(IMEC), T. Schram(IMEC), Stefan De Gendt(Imec the Netherlands), G. Groeseneken(KU Leuven)
Materials Science and Engineering R Reports
April 1, 2006
10.1016/j.mser.2006.04.001
Cited by 278

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