Statistical model for stress-induced leakage current and pre-breakdown current jumps in ultra-thin oxide layers

R. Degraeve(IMEC), G. Groeseneken(KU Leuven), Paul Hendrickx(IMEC), Jan Van Houdt(KU Leuven), F. Schuler(Infineon Technologies (Germany)), B. Kaczer(IMEC), G. Tempel(Infineon Technologies (Germany)), L. Haspeslagh(IMEC), M. Lorenzini(IMEC), D. Wellekens(IMEC)
Unknown
November 13, 2002
10.1109/iedm.2001.979447
Cited by 25

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