Laser thermal anneal of polysilicon channel to boost 3D memory performance
J. G. Lisoni(IMEC), Jan Van Houdt(KU Leuven), C.-L. Tan(IMEC), I. Toqué‐Tresonne, G. Van den bosch(IMEC), G. Congedo, E. Capogreco(IMEC), R. Degraeve(IMEC), Li Liu(Central South University), A. Arreghini(IMEC), M. Toledano-Luque(Universidad Complutense de Madrid), Karim Huet
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