Statistical spectroscopy of switching traps in deeply scaled vertical poly-Si channel for 3D memories
M. Toledano-Luque(Universidad Complutense de Madrid), Jan Van Houdt(KU Leuven), C.-L. Tan(IMEC), G. Van den bosch(IMEC), A. Arreghini(IMEC), Vu Luong(IMEC), Ph. Roussel(IMEC), R. Degraeve(IMEC), Bao-Jun Tang(Beijing Institute of Technology), J. G. Lisoni(IMEC), G. Groeseneken(KU Leuven)
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