Insight Into N/PBTI Mechanisms in Sub-1-nm-EOT Devices
Moonju Cho(IMEC), G. Groeseneken(KU Leuven), M. Aoulaiche(IMEC), Jae-Duk Lee(Samsung (South Korea)), T. Kauerauf(IMEC), B. Kaczer(IMEC), R. Degraeve(IMEC), J. Franco(KU Leuven), Philippe Roussel(IMEC), Lars‐Åke Ragnarsson(IMEC)
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