Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices
Hiroaki Arimura(IMEC), Naoto Horiguchi(IMEC), S. Biesemans(IMEC), Michael Givens(ASM International (Belgium)), A. Leonhardt(ASM International (Finland)), P. Sippola(ASM International (Finland)), S. Brus(University of Liège), E. Dentoni Litta(IMEC), Qiyuan Xie(ASM International (Belgium)), RuoFei CHANG(ASM International (Belgium)), Yusuke Oniki(IMEC), J. Franco(KU Leuven), Giuseppe Alessio Verni(ASM International (Belgium)), Lars‐Åke Ragnarsson(IMEC), T. Ivanova(ASM International (Finland)), Jérôme Mitard(IMEC), A. Vandooren(IMEC)
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