An InGaAs/InP quantum well finfet using the replacement fin process integrated in an RMG flow on 300mm Si substrates
Niamh Waldron, A. V-Y. Thean(IMEC), Clément Merckling(IMEC), Laura Nyns(IMEC), Farid Sebaai(IMEC), Weiming Guo(Université Européenne de Bretagne), Sheikh Ansar, Alexey Milenin, A. Pourghaderi(IMEC), Nadine Collaert(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Marc Heyns(IMEC), D. Tsvetanova(IMEC), H. Bender(IMEC), Patrick Ong(IMEC), Lieve Teugels(IMEC), Dennis H. van Dorp(IMEC), G. Boccardi(IMEC), Dennis Lin(IMEC), Jérôme Mitard(IMEC), Bastien Douhard(IMEC), K. Barla(IMEC), Olivier Richard(IMEC)
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