High-κ dielectics integration prospects

S. Kubicek(IMEC), S. Biesemans(IMEC), M. Jurczak(IMEC), A. Lauwers, M. Niwa, Marc Heyns(IMEC), G.S. Lujan(IMEC), Stefan De Gendt(Imec the Netherlands), N. Van Hoomick, A. Rothschild(IMEC), Martine Claes(Imec the Netherlands), Katsuhiko Yamamoto, A. Veloso(IMEC), J. A. Kittl(IMEC), S. Beckx(Imec the Netherlands), Sven Van Elshocht(Columbia University), K. Anil(IMEC), V. Kaushik(IMEC), S. Hyun, Dong-Hwa Kwak, Annelies Delabie(IMEC)
Unknown
January 1, 2005
Cited by 0


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