Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
Pieter Dumon(Ghent University), Roel Baets(Ghent University), Dries Van Thourhout(Ghent University Hospital), Vincent Wiaux(Imec the Netherlands), Bert Luyssaert(Ghent University), Dirk Taillaert(Ghent University), Wim Bogaerts(Ghent University), Peter Bienstman(Ghent University Hospital), S. Beckx(Imec the Netherlands), Joris Van Campenhout(IMEC), Johan Wouters(Imec the Netherlands)
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