RMG Tech. Integration in FinFET Devices
G. Boccardi(IMEC), Aaron Thean(National University of Singapore), Minhyuk Kim, S. Brus(University of Liège), M. Togo(IMEC), K. Devriendt(IMEC), Naoto Horiguchi(IMEC), Suzuki Yuichiro, Aline Bessa Veloso, T. Chiarella(IMEC), R. Ritzenthaler(IMEC), Soon Aik Chew(IMEC), E. Vecchio(IMEC), Pang-Leen Ong, S. Locorotondo(IMEC)
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