Characteristics and Integration Challenges of FinFET-based Devices for (Sub-)22nm Technology Nodes Circuit Applications
A. Veloso(IMEC), R.J.P. Lander(NXP (Belgium)), L. Witters(IMEC), M. Jurczak(IMEC), A. Redolfi(IMEC), B. J. Pawlak, S. Brus(University of Liège), Nadine Collaert(IMEC), Thomas Hoffmann(IMEC), A. De Keersgieter(IMEC), Ray Duffy(NXP (Belgium)), P. Absil(IMEC), B. Duriez(IMEC), R. Rooyackers(IMEC), M.J.H. van Dal(IMEC), G. Vellianitis(NXP (Belgium)), T. Mérelle, S. Biesemans(IMEC)
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