Abrupt breakdown in dielectric/metal gate stacks: a potential reliability limitation?

T. Kauerauf(IMEC), Stefan De Gendt(Imec the Netherlands), Ph. Roussel(IMEC), B. Kaczer(IMEC), R. Degraeve(IMEC), H.E. Maes(IMEC), M. Cho(IMEC), M. B. Zahid(IMEC), G. Groeseneken(KU Leuven)
IEEE Electron Device Letters
September 20, 2005
10.1109/led.2005.856015
Cited by 40

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