Electron Trap Profiling Near $\hbox{Al}_{2} \hbox{O}_{3}$/Gate Interface in TANOS Stack Using Gate-Side Trap Spectroscopy by Charge Injection and Sensing
M. B. Zahid(IMEC), Jan Van Houdt(KU Leuven), A. Arreghini(IMEC), A. Suhane(IMEC), R. Degraeve(IMEC), B. Govoreanu(IMEC)
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