Dynamics of threshold voltage instability in stacked high-k dielectrics: role of the interfacial oxide

L. Pantisano(IMEC), H.E. Maes(IMEC), R. Degraeve(IMEC), E. Cartier(IBM (United States)), A. Kerber(Infineon Technologies (Germany)), G. Groeseneken(KU Leuven), M. Lorenzini(IMEC), M. Rosmeulen(IMEC)
Unknown
March 1, 2004
10.1109/vlsit.2003.1221136
Cited by 21

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