Work function engineering by FUSI and its impact on the performance and reliability of oxynitride and Hf-silicate based MOSFETs

A. Veloso(IMEC), S. Bieseinans(IMEC), L. Witters(IMEC), M. Jurczak(IMEC), A. Lauwers(IMEC), S. Brus(University of Liège), T. Kauerauf(IMEC), K. Devriendt(IMEC), B. Sijmus(IMEC), Jean‐François de Marneffe(IMEC), K.G. Anil(IMEC), S. Kubicek(IMEC)
Unknown
April 19, 2005
Cited by 15


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