Work function engineering by FUSI and its impact on the performance and reliability of oxynitride and Hf-silicate based MOSFETs
A. Veloso(IMEC), S. Bieseinans(IMEC), L. Witters(IMEC), M. Jurczak(IMEC), A. Lauwers(IMEC), S. Brus(University of Liège), T. Kauerauf(IMEC), K. Devriendt(IMEC), B. Sijmus(IMEC), Jean‐François de Marneffe(IMEC), K.G. Anil(IMEC), S. Kubicek(IMEC)
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