Multi-Vt Gate Stack Technologies for Nanosheet and CFET Devices
Hiroaki Arimura(IMEC), Naoto Horiguchi(IMEC), Michael Givens(ASM International (Belgium)), S. Brus(University of Liège), Thierry Conard(IMEC), L.-Å. Ragnarsson(IMEC), J. Franco(KU Leuven), Giuseppe Alessio Verni(ASM International (Belgium)), Balakrishnan Kannan(ASM International), Jan Willem Maes(ASM International (Belgium)), W. Maqsood(IMEC), A. Vandooren(IMEC)
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