Passivation of Ge(100)∕GeO[sub 2]∕high-κ Gate Stacks Using Thermal Oxide Treatments
Florence Bellenger(IMEC), Marc Heyns(IMEC), Thierry Conard(IMEC), Matty Caymax(IMEC), Valeri Afanasiev(KU Leuven), Marc Meuris(IMEC), Annelies Delabie(IMEC), K. De Meyer(IMEC), Michel Houssa(IMEC)
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