Insights into Scaled Logic Devices Connected from Both Wafer Sides

A. Veloso(IMEC), Naoto Horiguchi(IMEC), Bjorn Vermeersch(IMEC), A. Laffitte(Institut polytechnique de Grenoble), D. Radisic(IMEC), Eric Beyne(IMEC), H. Arimura(IMEC), A. De Keersgieter(IMEC), Anne Jourdain(IMEC), E. Simoen(IMEC), Yusuke Oniki(IMEC), Geert Eneman(Research Foundation - Flanders), P. Matagne(IMEC), Barry O’Sullivan(Toshiba (Japan)), S. Brus(University of Liège), Rongmei Chen(Peking University), E. Dentoni Litta(IMEC)
2022 International Electron Devices Meeting (IEDM)
December 3, 2022
Cited by 6


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