BTI Reliability Improvement Strategies in Low Thermal Budget Gate Stacks for 3D Sequential Integration
J. Franco(KU Leuven), B. Kaczer(IMEC), A. Vandooren(IMEC), G. Groeseneken(KU Leuven), V. De Heyn(IMEC), Zhicheng Wu(KU Leuven), S. Brus(University of Liège), Daire Cott(IMEC), Nadine Collaert(IMEC), Tibor Grasser(TU Wien), Geert Hellings(IMEC), Naoto Horiguchi(IMEC), Julien Ryckaert(IMEC), D. Linten(IMEC), Hiroaki Arimura(IMEC), Lars‐Åke Ragnarsson(IMEC), G. Rzepa(TU Wien)
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