Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETs

A. Veloso(IMEC), M. Jurczak(IMEC), Eddy Simoen(IMEC), Rita Vos(IMEC), S. Brus(University of Liège), T. Kauerauf(IMEC), Thierry Conard(IMEC), Nadine Collaert(IMEC), N.J. Son(IMEC), M. Demand(IMEC), Ph. Roussel(IMEC), B. Kaczer(IMEC), Isabelle Ferain(IMEC), Liesbeth Witters(IMEC), Christoph Adelmann(Imec the Netherlands), H. Bender(IMEC), Sven Van Elshocht(Columbia University), R. Rooyackers(IMEC), Olivier Richard(IMEC), K. De Meyer(IMEC), S. Biesemans(IMEC)
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June 1, 2008
Cited by 27


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