Poly-Silicon Wet Removal for Replacement Gate Integration Scheme: Impact of Process Parameters on the Removal Rate
Farid Sebaai(IMEC), Stefan De Gendt(Imec the Netherlands), K. Devriendt(IMEC), Martine Claes(Imec the Netherlands), A. Veloso(IMEC), P. Absil(IMEC), Paul Mertens(IMEC), S. Brus(University of Liège)
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
April 1, 2012
Cited by 3
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