Trap Spectroscopy by Charge Injection and Sensing (TSCIS): A quantitative electrical technique for studying defects in dielectric stacks
R. Degraeve(IMEC), G. Groeseneken(KU Leuven), Jan Van Houdt(KU Leuven), B. Kaczer(IMEC), B. Govoreanu(IMEC), M. Cho(IMEC), M. B. Zahid(IMEC), M. Jurczak(IMEC)
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