A comprehensive study of channel hot-carrier degradation in short channel MOSFETs with high-k dielectrics

E. Amat(Universitat Autònoma de Barcelona), G. Groeseneken(KU Leuven), X. Aymerich(Vall d'Hebron Hospital Universitari), R. Rodrı́guez(Universitat Autònoma de Barcelona), R. Degraeve(IMEC), T. Kauerauf(IMEC), M. Nafrı́a(Universitat Autònoma de Barcelona)
Microelectronic Engineering
November 8, 2012
10.1016/j.mee.2012.10.011
Cited by 20

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