Achieving Low-$V_{T}$ Ni-FUSI CMOS by Ultra-Thin $\hbox{Dy}_{2}\hbox{O}_{3}$ Capping of Hafnium Silicate Dielectrics

A. Veloso(IMEC), S. Biesemans(IMEC), A. Lauwers(IMEC), Bart Onsia, S. Brus(University of Liège), M. Demand(IMEC), Christoph Adelmann(Imec the Netherlands), H.Y. Yu(IMEC), Geoffrey Pourtois(IMEC), P. Lehnen(IMEC), Barry O’Sullivan(Toshiba (Japan)), P. Absil(IMEC), Sven Van Elshocht(Columbia University), R. Singanamalla(IMEC), S.Z. Chang(KU Leuven), K. De Meyer(IMEC), M. Jurczak(IMEC)
IEEE Electron Device Letters
November 1, 2007
Cited by 0


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