Direct measurement of the inversion charge in MOSFETs: application to mobility extraction in alternative gate dielectrics
A. Kerber(Infineon Technologies (Germany)), G. Groeseneken(KU Leuven), L. Pantisano(IMEC), L.-Å. Ragnarsson(IMEC), R. Degraeve(IMEC), Y. Kim(IMEC), E. Cartier(IMEC), M. Rosmeulen(IMEC)
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