Direct measurement of the inversion charge in MOSFETs: application to mobility extraction in alternative gate dielectricsA. Kerber, G. Groeseneken, L. Pantisano et al.|Unknown|2004Cited by 32
Investigation of poly-Si/HfO/sub 2/ gate stacks in a self-aligned 70nm MOS process flowS. Kubicek, K. De Meyer, J. Chen et al.|Unknown|2004Cited by 4