DRAM-Peri FinFET - A Thermally-Stable High-Performance Advanced CMOS RMG Platform with Mo-Based pWFM for sub-10nm DRAM
Jhuma Ganguly(Indian Institute of Engineering Science and Technology, Shibpur), Naoto Horiguchi(IMEC), Jan Willem Maes(ASM International (Belgium)), A. Spessot(IMEC), Michael Givens(ASM International (Belgium)), S. Brus(University of Liège), E. Capogreco(IMEC), H. Arimura(IMEC), Sungwon Yoon(SK Group (South Korea)), R. Ritzenthaler(IMEC), Balakrishnan Kannan(ASM International), Ritam Sarkar(IMEC), W. Maqsood(IMEC), J. G. Lai(IMEC), H. Bana(ASM International (Belgium)), Vladimir Machkaoutsan(ASM International (Belgium))
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