Characterisation of ALCVD Al2O3–ZrO2 nanolaminates, link between electrical and structural properties

W.F.A. Besling(Philips (France)), Suvi Haukka, Thierry Conard(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Edward Young(Planetary Science Institute), Marc Heyns(IMEC), R. Carter(IMEC), Stefan De Gendt(Imec the Netherlands), Jan Willem Maes(ASM International (Belgium)), M. Tuominen(ASM International (Belgium)), Chao Zhao
Journal of Non-Crystalline Solids
May 1, 2002
10.1016/s0022-3093(02)00969-9
Cited by 95

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