Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

Yoïchi Tanaka(Mercy Willard Hospital), Naoto Horiguchi(IMEC), Michael Givens(ASM International (Belgium)), Frank Holsteyns, S. Brus(University of Liège), Efrain Altamirano Sánchez, Antoine Pacco, Yusuke Oniki(IMEC), Hideaki Iino(Kurita Water Industries (Japan)), Giuseppe Alessio Verni(ASM International (Belgium)), Nobuko Gan(Kurita Water Industries (Japan)), Yuuichi Ogawa(Kurita Water Industries (Japan)), Ren Jie Chang(ASM International (Belgium)), Hiroaki Arimura(IMEC), Ju Geng Lai, Suvidyakumar Homkar
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
August 14, 2023
10.4028/p-qqi9w5
Cited by 0

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