Evaluation of Megasonic Cleaning for Sub-90nm Technologies
Guy Vereecke(IMEC), Paul Mertens(IMEC), Frank Holsteyns, Patrick Jaenen(IMEC), Marcel Lux, Karine Kenis(IMEC), Sophia Arnauts(IMEC), S. Beckx(Imec the Netherlands), Marjorie Lismont, James Snow(IMEC), Rita Vos(IMEC)
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
April 1, 2005
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