Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET
Hiroaki Arimura(IMEC), Naoto Horiguchi(IMEC), A. Vandooren(IMEC), Michael Givens(ASM International (Belgium)), Eric Shero(ASM International), S. Brus(University of Liège), E. Dentoni Litta(IMEC), Petro Deminskyi(ASM International (Finland)), Thierry Conard(IMEC), M. Samiee(ASM International), Jonathan R. Bakke(Applied Materials (United States)), Yusuke Oniki(IMEC), J. Franco(KU Leuven), Giuseppe Alessio Verni(ASM International (Belgium)), Wei Li(Chinese Academy of Sciences), Balakrishnan Kannan(ASM International), Lars‐Åke Ragnarsson(IMEC), N. Jourdan(IMEC), Jan Willem Maes(ASM International (Belgium)), Jérôme Mitard(IMEC), B. T. Chan
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