Wafer-scale integration of double gated WS<sub>2</sub>-transistors in 300mm Si CMOS fab
Inge Asselberghs(IMEC), Iuliana Radu(IMEC), Emmanuel Dupuy(IMEC), W. Li(IMEC), Cedric Huyghebaert(IMEC), Alain Phommahaxay(IMEC), Quentin Smets(IMEC), Benjamin Groven(IMEC), Steven Brems(IMEC), Daire Cott(IMEC), Aryan Afzalian(IMEC), D. Radisic(IMEC), K. Devriendt(IMEC), Matty Caymax(IMEC), Devin Verreck(IMEC), Goutham Arutchelvan(KU Leuven), Koen Kennes(IMEC), T. Maurice(IMEC), Abhinav Gaur(KU Leuven), Dennis Lin(IMEC), T. Schram(IMEC), P. Morin(IMEC), Arame Thiam(IMEC)
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