Novel GAA Si Nanowire p-MOSFETs With Excellent Short-Channel Effect Immunity via an Advanced Forming Process
Qingzhu Zhang(Hebei University of Technology), Tianchun Ye(University of Chinese Academy of Sciences), Zhenhua Wu(University of Chinese Academy of Sciences), Jiaxin Yao(Chinese Academy of Sciences), Hong Yang(Chinese Academy of Sciences), Yudong Li(Chinese Academy of Sciences), Guilei Wang(Chinese Academy of Sciences), Hailing Tu(Grinm Advanced Materials (China)), Junjie Li(University of Chinese Academy of Sciences), Junfeng Li(Institute of Microelectronics), Wenjuan Xiong(Institute of Microelectronics), Lingkuan Meng(Institute of Microelectronics), Chao Zhao(Chinese Academy of Sciences), Huaxiang Yin(Chinese Academy of Sciences)
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