High-k Dielectrics Integration Prospects

Stefan Kubicek(Austrian Academy of Sciences), S. Biesemans(IMEC), M. Jurczak(IMEC), A. Lauwers(IMEC), N. Van Hoornick, Anil Kottantharayil(IMEC), M. Niwa, Marc Heyns(IMEC), G.S. Lujan(IMEC), Stefan De Gendt(Imec the Netherlands), A. Rothschild(IMEC), Martine Claes(Imec the Netherlands), A. Veloso(IMEC), J. A. Kittl(IMEC), S. Beckx(Imec the Netherlands), Sven Van Elshocht(Columbia University), Kazuhiko Yamamoto(Imec the Netherlands), Sangjin Hyun(Samsung (United States)), Annelies Delabie(IMEC), Vidya Kaushik, Dong Hwa Kwak
ECS Meeting Abstracts
February 22, 2006
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