SILC defect generation spectroscopy in HfSiON using constant voltage stress and substrate hot electron injection
Robert O’Connor(IMEC), G. Groeseneken(KU Leuven), Ph. Roussel(IMEC), B. Kaczer(IMEC), R. Degraeve(IMEC), L. Pantisano(IMEC), T. Kauerauf(IMEC)
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