Impact of Epi-Si growth temperature on Ge-pFET performance
Jérôme Mitard(IMEC), Marc Heyns(IMEC), Christopher G. Shea(Rochester Institute of Technology), Jason Lin(Apellis Pharmaceuticals (United States)), Chelsea Plourde(Rochester Institute of Technology), Frederik Leys(IMEC), Thomas Hoffmann(IMEC), Matty Caymax(IMEC), B. Kaczer(IMEC), Geert Hellings(IMEC), Kristin DeMeyer(IMEC), J. Franco(KU Leuven), Geert Eneman(Research Foundation - Flanders), Marc Meuris(IMEC), Wei Wang(Peking University), S. DeGendt(IMEC), Roger Loo(IMEC), B. DeJaeger(IMEC), Koen Martens(IMEC)
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