Charge trapping in SiO2/HfO2 gate dielectrics: Comparison between charge-pumping and pulsed ID–VG

A. Kerber(Infineon Technologies (Germany)), Udo Schwalke(Technische Universität Darmstadt), H.E. Maes(IMEC), G. Groeseneken(KU Leuven), E. Cartier(IBM (United States)), R. Degraeve(IMEC), L. Pantisano(IMEC)
Microelectronic Engineering
January 22, 2004
Cited by 39


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