Optimized germanium co-implant with B2H6 PLAD for better advanced PMOS device performanceLequn Jennifer Liu, Allen McTeer, Shu Qin et al.|Surface and Coatings Technology|2012Cited by 6
Plasma chemistry study of PLAD processesShu Qin, Maoying Wang, Lequn Jennifer Liu et al.|AIP conference proceedings|2012Cited by 3
Effects of implant temperature on process characteristics of low energy boron implanted siliconLequn Jennifer Liu, Allen McTeer, Wei Hui Hsu et al.|AIP conference proceedings|2012Cited by 2
A novel method to eliminate the toppling issue for small CD/high AR/dense structuresLequn Jennifer Liu, Ceredig Roberts, Jixin Yu et al.|Unknown|2014Cited by 0
LDD implant process optimization for high voltage NMOS improvementLequn Jennifer Liu, Allen McTeer, Shu Qin et al.|Unknown|2014Cited by 0