A novel method to eliminate the toppling issue for small CD/high AR/dense structures
Lequn Jennifer Liu(Micron (United States)), Ceredig Roberts(Micron (United States)), Jixin Yu(Micron (United States)), Gordon Haller(Micron (United States)), Yongjun Hu(South China Normal University), Allen McTeer(Micron (United States)), Stephen W. Russell(Micron (United States)), Shu Qin(Micron (United States))
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